am9b20203_si_001.pdf (376.01 kB)
Effect of Thickness on the Optical and Electrical Properties of ITO/Au/ITO Sandwich Structures
journal contribution
posted on 2020-03-04, 21:46 authored by Ka Kin Lam, Sheung Mei Ng, Hon Fai Wong, Linfeng Fei, Yukuai Liu, Ka Ho Chan, Hui Ye, Chi Wah Leung, Chee Leung MakTin-doped
indium oxide (ITO)/Au/ITO sandwich structures with varying
top and bottom ITO film thicknesses were deposited by magnetron sputtering.
The effects of varying thickness of the two ITO films on the structural,
electrical, and optical properties of the sandwich structures were
investigated. X-ray diffraction spectra showed that by inserting an
ultrathin Au film, the average grain size of the top ITO layer was
significantly increased, but not for the bottom one. The optical properties
of the sandwich structures were measured by transmittance measurement
and spectroscopic ellipsometry. In the symmetric structure, where
the top and the bottom ITO layers had the same thickness, we demonstrated
that the crossover wavelength can be changed from the visible range
(830 nm) to the near-infrared range (1490 nm) by increasing the top
as well as bottom ITO thickness, corresponding to a plasmonic tuning
ability of over 600 nm. The evaluation of this trilayer structure
as a plasmonic device was asserted based on three quality factors.
A comparison of the performance of this trilayer structure with conventional
materials was also discussed.