Uniform Huygens Metasurfaces with Postfabrication
Phase Pattern Recording Functionality
Posted on 2023-03-18 - 18:03
With
the rapid progress in the field of metasurfaces and their
use in miniature integrated devices arises the quest for cheap mass
production of efficient metasurfaces. We suggest a novel way to design
and fabricate phase-gradient Huygens metasurfaces using laser-annealing
of uniform particles made of As2S3 chalcogenide
glass. We show that a phase gradient metasurface can be realized by
tuning the refractive index of otherwise identical meta-atoms instead
of tuning their geometry. We are using an array of identical As2S3 particles with the possibility to locally change
their refractive index using a short-wavelength illumination (green
laser) in order to tune the phase pattern at the postfabrication stage.
Metasurfaces fabricated with this method can be used for operation
in the red or IR spectral range. We fabricate uniform As2S3 Huygens metasurfaces using electron beam lithography
and demonstrate their postfabrication tuning with exposure of comparatively
low intensity. Sample characterizations with transmittance measurements
and quantitative phase microscopy provide results in good correspondence
with numerical predictions confirming postfabrication spectral tuning.
Using such tuning, we demonstrate the possibility of transferring
the intensity pattern produced by modifying a writing beam with a
spatial light modulator to a phase pattern recorded on a uniform As2S3 metasurface. Our method has potential advantages
for the low-cost production of large-scale metasurfaces because uniform
geometries are better adjusted for mass manufacturing.
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