Highly
Stretchable and Sensitive Pressure Sensor Array
Based on Icicle-Shaped Liquid Metal Film Electrodes
Posted on 2020-06-15 - 20:29
Flexible
pressure sensors emerge for important applications in
wearable electronics, with increasing requirements for high sensitivity,
fast response, and low detection limit. However, there is still a
challenge in this field, that is, how to maximize both the electrical
performance and mechanical stretchability simultaneously. Here, we
report a straightforward and cost-effective method to fabricate highly
stretchable and sensitive capacitive pressure sensor arrays. It features
a unique design of integrating the icicle-shaped liquid metal film
electrode and reliable processing of the liquid metal and elastomer.
Under an external load, the deformation of the elastic bump structure
dramatically results in an increase in the overlapping area of the
electrodes and a decrease in the separation distance, offering a new
capacitive sensing scheme with an enhanced sensitivity. Our sensor
has been demonstrated with a high sensitivity of 39% kPa–1 in the range of 0–1 kPa, limit of detection as low as 12
Pa, hysteresis error of 8.46% at a maximum pressure of 25 kPa, and
stretchability up to 94% strain without any failure. The arrayed sensor
has been successfully applied to force measurements on a curved surface,
contour mapping of external loads, and monitoring of contact pressures
under various cervical postures.
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Zhang, Yiqiu; Liu, Sidi; Miao, Yihui; Yang, Han; Chen, Xuyue; Xiao, Xiang; et al. (2020). Highly
Stretchable and Sensitive Pressure Sensor Array
Based on Icicle-Shaped Liquid Metal Film Electrodes. ACS Publications. Collection. https://doi.org/10.1021/acsami.0c04939
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AUTHORS (10)
YZ
Yiqiu Zhang
SL
Sidi Liu
YM
Yihui Miao
HY
Han Yang
XC
Xuyue Chen
XX
Xiang Xiao
ZJ
Zhongyun Jiang
XC
Xinjian Chen
BN
Baoqing Nie
JL
Jian Liu
KEYWORDS
Icicle-Shaped Liquid Metal Film Electrodesdetection limitcapacitive pressure sensor arraysforce measurementspressure sensorscontact pressuressensitivitystretchabilityloadhysteresis error25 kPametal film electrodeSensitive Pressure Sensor Arraycontour mappingwearable electronics12 Paseparation distance