jz1c03968_si_002.mp4 (16.58 MB)
Download fileInspection of Line Defects in Transition Metal Dichalcogenides Using a Microscopic Hyperspectral Imaging Technique
media
posted on 2022-03-03, 14:09 authored by Xiangmin Hu, Huixian Liu, Cuicui Qiu, Dameng LiuThe
line defects of two-dimensional (2D) transition metal dichalcogenides
(TMDs) play a vital role in determining their device performance.
In this work, a microscopic hyperspectral imaging technique based
on differential reflectance was introduced for the online inspection
of line defects in TMDs. Upon comparison of the measurement results
of imaging and spectra, the relationship between optical contrast
and differential reflectance spectra was established. A light selection
method was proposed to optimize the optical contrast of line defects.
Via application of an image processing algorithm, an automatic detection
of the line defects with a classification accuracy of 95% was achieved
for WS2, MoS2, and MoSe2. This work
not only provides a microscopic hyperspectral imaging technique for
detecting 2D material defects but also introduces a versatile design
strategy for developing an advanced machine vision spectroscopic system.
History
Usage metrics
Categories
Keywords
versatile design strategytransition metal dichalcogenideslight selection methodimage processing algorithmdifferential reflectance spectradifferential reflectancevital rolevia applicationupon comparisonoptical contrastmeasurement resultsline defectsdevice performanceclassification accuracyautomatic detectionalso introduces