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Download fileFully Integrated CMOS Microsystem for Electrochemical Measurements on 32 × 32 Working Electrodes at 90 Frames Per Second
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posted on 2014-07-01, 00:00 authored by Joerg Rothe, Olivier Frey, Alexander Stettler, Yihui Chen, Andreas HierlemannMicroelectrode arrays offer the potential
to electrochemically
monitor concentrations of molecules at high spatial resolution. However,
current systems are limited in the number of sensor sites, signal
resolution, and throughput. Here, we present a fully integrated complementary
metal oxide semiconductor (CMOS) system with an array of 32 ×
32 working electrodes to perform electrochemical measurements like
amperometry and voltammetry. The array consists of platinum electrodes
with a center-to-center distance of 100 μm and electrode diameters
of 5 to 50 μm. Currents in the range from 10 μA down to
pA can be measured. The current is digitized by sigma-delta converters
at a maximum resolution of 13.3 bits. The integrated noise is 220
fA for a bandwidth of 100 Hz, allowing for detection of pA currents.
Currents can be continuously acquired at up to 1 kHz bandwidth, or
the whole array can be read out rapidly at a frame rate of up to 90
Hz. The results of the electrical characterization meet the requirements
of a wide range of electrochemical methods including cyclic voltammograms
and amperometric images of high spatial and temporal resolution.
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Integrated CMOS Microsystemplatinum electrodes1 kHz bandwidthcyclic voltammograms13.3 bitsamperometric imagesmetal oxide semiconductorelectrochemical methods90 HzElectrochemical MeasurementspA currents50 μ m10 μframe rate220 fA100 μ m90 FramesSecondMicroelectrode arrays offersignal resolutionelectrode diameterselectrochemical measurementssensor sites100 Hz