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Folding Sheets with Ion Beams
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posted on 2016-12-05, 00:00 authored by Cheng-Lun Wu, Fang-Cheng Li, Chun-Wei Pao, David J. SrolovitzFocused
ion beams (FIBs) are versatile tools with cross-disciplinary applications
from the physical and life sciences to archeology. Nevertheless, the
nanoscale patterning precision of FIBs is often accompanied by defect
formation and sample deformation. In this study, the fundamental mechanisms
governing the large-scale plastic deformation of nanostructures undergoing
FIB processes are revealed by a series of molecular dynamic simulations.
A surprisingly simple linear correlation between atomic volume removed
from the film bulk and film deflection angle, regardless of incident
ion energy and current, is revealed, demonstrating that the mass transport
to the surface of material caused by energetic ion bombardment is
the primary cause leading to nanostructure deformation. Hence, by
controlling mass transport by manipulation of the incident ion energy
and flux, it is possible to control the plastic deformation of nanostructures,
thereby fabricating nanostructures with complex three-dimensional
geometries.