High-entropy oxides are emerging
materials with unique functionalities.
However, while various bulk-type high-entropy oxides have been developed,
limited research has been pursued for high-entropy oxide thin films.
In this paper, we report the synthesis of LiCr1/6Mn1/6Fe1/6Co1/6Ni1/6Cu1/6O2 epitaxial thin films with a layered rocksalt structure
via the pulsed laser deposition technique. We obtained a single-phase
epitaxial thin film by tuning the laser fluence and substrate temperature.
In addition, we fabricated a thin-film-type solid-state battery with
the epitaxial thin film as a positive electrode. The battery exhibited
stable operation. The results of this study provide a platform for
synthesizing high-entropy oxide epitaxial thin films with the layered
rocksalt structure.