Due to the unique properties of core/shell
particles, these structures
have been considered in various applications. Employing core/shell
particles consisting of a polymer core and a ceramic shell as an abrasive
in a chemical mechanical planarization (CMP) process enhanced the
quality of processed wafers. In the present study, polystyrene/silica
core/shell particles were synthesized and the elastic modulus was
examined via atomic force microscopy (AFM). The impact of the indentation
depth and contact mechanics models on the elastic modulus was studied.
Also, the plastic properties of particles were examined for the first
time. Using the Hertz model and a diamond-like carbon (DLC) probe,
the elastic moduli of the polymer and core/shell particles were measured
at 2.82 ± 0.03 and 6.53 ± 0.05 GPa, respectively.