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Suspended Nanochannel Resonator Arrays with Piezoresistive Sensors for High-Throughput Weighing of Nanoparticles in Solution
journal contribution
posted on 2020-04-01, 14:49 authored by Marco Gagino, Georgios Katsikis, Selim Olcum, Leopold Virot, Martine Cochet, Aurélie Thuaire, Scott R. Manalis, Vincent AgacheAs the use of nanoparticles
is expanding in many industrial sectors,
pharmaceuticals, cosmetics among others, flow-through characterization
techniques are often required for in-line metrology. Among the parameters
of interest, the concentration and mass of nanoparticles can be informative
for yield, aggregates formation or even compliance with regulation.
The Suspended Nanochannel Resonator (SNR) can offer mass resolution
down to the attogram scale precision in a flow-through format. However,
since the readout has been based on the optical lever, operating more
than a single resonator at a time has been challenging. Here we present
a new architecture of SNR devices with piezoresistive sensors that
allows simultaneous readout from multiple resonators. To enable this
architecture, we push the limits of nanofabrication to create implanted
piezoresistors of nanoscale thickness (∼100 nm) and implement
an algorithm for designing SNRs with dimensions optimized for maintaining
attogram scale precision. Using 8-in. processing technology, we fabricate
parallel array SNR devices which contain ten resonators. While maintaining
a precision similar to that of the optical lever, we demonstrate a
throughput of 40 000 particles per houran order of
magnitude improvement over a single device with an analogous flow
rate. Finally, we show the capability of the SNR array device for
measuring polydisperse solutions of gold particles ranging from 20
to 80 nm in diameter. We envision that SNR array devices will open
up new possibilities for nanoscale metrology by measuring not only
synthetic but also biological nanoparticles such as exosomes and viruses.
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nanoparticlein-line metrologymass resolutionSuspended Nanochannel Resonator40 000 particlesflow-through formatmagnitude improvementpolydisperse solutionsflow ratePiezoresistive Sensorsarray SNR devices40 000dimensions optimizedSNR array deviceSNR array devicesprocessing technologySuspended Nanochannel Resonator Arraysresonator80 nmSNR devicesgold particlesflow-through characterization techniquesaggregates formationattogram scale precisionnanoscale metrologypiezoresistive sensors
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