Infrared surface
spectroscopic techniques commonly have long-term
issues that (1) the multiple reflections of light in the substrate
yield optical interference fringes in the absorption spectrum and
(2) the double modulation of light at the interferometer in a Fourier
transform infrared spectrometer makes the water-vapor subtraction
impossible. These measurement troubles often disturb the quantitative
analysis of chemical bands of the analyte thin film. Multiple-angle
incidence resolution spectrometry (MAIRS) is not an exception in this
matter, either. In the present study, the long-term common issues
have first been resolved by fixing the angle of incidence at a large
angle, whereas the polarization angle is changed. With this simple
conceptual change of MAIRS, as a result, we are ready for concentrating
on spectral analysis only without concerning about the measurement
troubles.