posted on 2018-03-06, 00:00authored byTiening Jin, Junchao Zhou, Zelun Wang, Ricardo Gutierrez-Osuna, Charles Ahn, Wonjun Hwang, Ken Park, Pao Tai Lin
Real-time
gas analysis on-a-chip was demonstrated using a mid-infrared
(mid-IR) microcavity. Optical apertures for the microcavity were made
of ultrathin silicate membranes embedded in a silicon chip using the
complementary metal-oxide-semiconductor (CMOS) process. Fourier transform
infrared spectroscopy (FTIR) shows that the silicate membrane is transparent
in the range of 2.5–6.0 μm, a region that overlaps with
multiple characteristic gas absorption lines and therefore enables
gas detection applications. A test station integrating a mid-IR tunable
laser, a microgas delivery system, and a mid-IR camera was assembled
to evaluate the gas detection performance. CH4, CO2, and N2O were selected as analytes due to their
strong absorption bands at λ = 3.25–3.50, 4.20–4.35,
and 4.40–4.65 μm, which correspond to C–H, C–O,
and O–N stretching, respectively. A short subsecond response
time and high gas identification accuracy were achieved. Therefore,
our chip-scale mid-IR sensor provides a new platform for an in situ,
remote, and embedded gas monitoring system.