posted on 2017-12-27, 00:00authored byKyung-Chul Ok, Jun-Hyung Lim, Hyun-Jun Jeong, Hyun-Mo Lee, You Seung Rim, Jin-Seong Park
Photochemical reactions
in inorganic films, which can be promoted by the addition of thermal
energy, enable significant changes in the properties of films. Metaphase
films depend significantly on introducing external energy, even at
low temperatures. We performed thermal-induced, deep ultraviolet-based,
thermal–photochemical activation of metaphase ZnOxNy films at low temperature,
and we observed peculiar variations in the nanostructures with phase
transformation and densification. The separated Zn3N2 and ZnO nanocrystalline lattice in amorphous ZnOxNy was stabilized remarkably
by the reduction of oxygen defects and by the interfacial atomic rearrangement
without breaking the N-bonding. On the basis of these approaches,
we successfully demonstrated highly flexible, nanocrystalline-ZnOxNy thin-film transistors
on polyethylene naphthalate films, and the saturation mobility showed
more than 60 cm2 V–1 s–1.