om9b00578_si_001.pdf (7.3 MB)
Ligand-Assisted Volatilization and Thermal Stability of Bis(imido)dichloromolybdenum(VI) ([(t‑BuN)2MoCl2]2) and Its Adducts
journal contribution
posted on 2019-11-08, 22:31 authored by Michael A. Land, Katherine N. Robertson, Seán T. BarryVolatile molybdenum-containing compounds
have successfully been
utilized for the atomic layer deposition of MoNx, MoO3, MoS2, and MoCxNy. Most of the reported volatile
molybdenum-containing compounds have been prepared via salt metathesis reactions of bis(tert-butylimido)dichloromolybdenum(VI) with anionic nitrogen-based ligands.
Herein we describe the preparation of several adducts of [(t-BuN)2MoCl2]2 (2) via ligand exchange reactions, which include the isolation
and characterization of (t-BuN)2MoCl2·2THF, (t-BuN)2MoCl2·(tetramethylethylenediamine), (t-BuN)2MoCl2·(2,2′-bipyridine),
(t-BuN)2MoCl2·(trimethylphosphine),
(t-BuN)2MoCl2·(1,2-bis(dimethylphosphino)ethane),
and (t-BuN)2MoCl2·(1,3-bis(tert-butyl)imidazolin-2-ylidene). These compounds have been
characterized using NMR spectroscopy and elemental analysis, and the
solid-state structures have been determined using single-crystal X-ray
crystallography. The volatility and thermal stability of all compounds
have been assessed using TGA and DSC, showing that the coordinated
ligands can improve the volatility, but in many cases the gas-phase
species reverts to 2. This highlights a strategy for
using coordinative ligands that are easily thermolyzed during evaporation
and delivery yet improve the volatility of a key precursor.