posted on 2021-07-23, 16:03authored byEitan Edri, Nina Armon, Ehud Greenberg, Shlomit Moshe-Tsurel, Danielle Lubotzky, Tommaso Salzillo, Ilana Perelshtein, Maria Tkachev, Olga Girshevitz, Hagay Shpaisman
Production of multilayered
microstructures composed of conducting
and insulating materials is of great interest as they can be utilized
as microelectronic components. Current proposed fabrication methods
of these microstructures include top-down and bottom-up methods, each
having their own set of drawbacks. Laser-based methods were shown
to pattern various materials with micron/sub-micron resolution; however,
multilayered structures demonstrating conducting/insulating/conducting
properties were not yet realized. Here, we demonstrate laser printing
of multilayered microstructures consisting of conducting platinum
and insulating silicon oxide layers by a combination of thermally
driven reactions with microbubble-assisted printing. PtCl2 dissolved in N-methyl-2-pyrrolidone (NMP) was used
as a precursor to form conducting Pt layers, while tetraethyl orthosilicate
dissolved in NMP formed insulating silicon oxide layers identified
by Raman spectroscopy. We demonstrate control over the height of the
insulating layer between ∼50 and 250 nm by varying the laser
power and number of iterations. The resistivity of the silicon oxide
layer at 0.5 V was 1.5 × 1011 Ωm. Other materials
that we studied were found to be porous and prone to cracking, rendering
them irrelevant as insulators. Finally, we show how microfluidics
can enhance multilayered laser microprinting by quickly switching
between precursors. The concepts presented here could provide new
opportunities for simple fabrication of multilayered microelectronic
devices.