In Situ Electrical Contacts to Graphene by Laser Scribing

Graphene with an atomically thin structure is considered to be a highly sensitive transducer capable of converting diverse external stimuli into measurable electrical signals. The generated signals, such as current and resistance, can be extracted through electrical contact to graphene. Conventional methods for contact formation are usually based on physical deposition of conductive materials on the target graphene. Here, we propose a method for in situ chemical synthesis of electrical contacts to graphene as an alternative approach that complements conventional physical methods. CO₂ laser irradiation on a polyimide film with monolayer graphene on top can convert the polyimide surface to conductive electrodes of laser-induced graphene (LIG) that electrically connect to the existing graphene channel. Laser-scribing conditions, such as the power and scan rate, can modulate the contact resistance of the LIG–graphene junction. Various arbitrary shapes of in situ LIG contacts can be scribed to the direct writing ability of the laser. The proposed in situ LIG contact method can be extended to other carbon nanomaterials, such as carbon nanotubes and PEDOT:PSS. As a proof of concept of the in situ LIG contacts to graphene for electronic device applications, graphene field-effect transistors were demonstrated on a graphene-supported polyimide substrate with LIG–graphene junctions as source/drain electrodes. Our approach will pave the way for the simple and low-cost fabrication of versatile graphene electronic devices by utilizing the existing LIG technology specialized for energy devices and sensors.