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Growth Inhibition to Enhance Conformal Coverage in Thin Film Chemical Vapor Deposition

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journal contribution
posted on 31.12.2008, 00:00 by Navneet Kumar, Angel Yanguas-Gil, Scott R. Daly, Gregory S. Girolami, John R. Abelson
Growth Inhibition to Enhance Conformal Coverage in Thin Film Chemical Vapor Deposition

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