nn8b03709_si_001.pdf (1.6 MB)
E‑Beam Nanostructuring and Direct Click Biofunctionalization of Thiol–Ene Resist
journal contribution
posted on 2018-09-13, 00:00 authored by Reza Zandi Shafagh, Alexander Vastesson, Weijin Guo, Wouter van der Wijngaart, Tommy HaraldssonElectron
beam lithography (EBL) is of major importance for ultraminiaturized
biohybrid system fabrication, as it allows combining biomolecular
patterning and mechanical structure definition on the nanoscale. Existing
methods are limited by multistep biomolecule immobilization procedures,
harsh processing conditions that are harmful to sensitive biomolecules,
or the structural properties of the resulting protein monolayers or
hydrogel-based resists. This work introduces a thiol–ene EBL
resist with chemically reactive thiol groups on its native surface
that allow the direct and selective “click” immobilization
of biomolecules under benign processing conditions. We constructed
EBL structured features of size down to 20 nm, and direct functionalized
the nanostructures with a sandwich of biotin and streptavidin. The
facile combination of polymer nanostructuring with biomolecule immobilization
enables mechanically robust biohybrid components of interest for nanoscale
biomedical, electronic, photonic, and robotic applications.