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Catalyst Enhanced Chemical Vapor Deposition:  Effects on Chemical Vapor Deposition Temperature and Film Purity

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posted on 1997-10-01, 00:00 authored by Yiping Zhang, Sam W.-K. Choi, Richard J. Puddephatt
Catalyst Enhanced Chemical Vapor Deposition:  Effects on Chemical Vapor Deposition Temperature and Film Purity

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    Journal of the American Chemical Society

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    Chemical Vapor Deposition TemperaturePurityEnhancedFilm

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