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Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity

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journal contribution
posted on 23.12.2014 by Xiaochuan Xu, Harish Subbaraman, Swapnajit Chakravarty, Amir Hosseini, John Covey, Yalin Yu, David Kwong, Yang Zhang, Wei-Cheng Lai, Yi Zou, Nanshu Lu, Ray T. Chen
Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2 × 104 and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation.