cm061999d_si_002.cif (16.97 kB)
Download fileNew Tungsten(VI) Guanidinato Complexes: Synthesis, Characterization, and Application in Metal−Organic Chemical Vapor Deposition of Tungsten Nitride Thin Films
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posted on 12.12.2006, 00:00 authored by Daniel Rische, Harish Parala, Eliza Gemel, Manuela Winter, Roland A. FischerTwo new tungsten complexes, [W(NtBu)2(NMe2){(iPrN)2CNMe2}] (2) and [W(NtBu)2(H){(iPrN)2CNMe2}]
(3), as precursors for metal−organic chemical vapor deposition (MOCVD) of tungsten nitride thin films
were synthesized from the starting compound [W(NtBu)2(Cl){(iPrN)2CNMe2}] (1) by substitution of the
chloro ligand by a dimethylamido and a hydrido group, respectively. Compounds 1−3 were characterized
by 1H NMR, 13C NMR, EI-MS, IR, and elemental analysis including single-crystal X-ray diffraction
studies on 1 and 3. The thermal properties of the compounds were studied by thermogravimetric and
differential thermal analysis. Precursors 2 and 3 were compared for the growth of tungsten nitride thin
films by MOCVD. The obtained films were characterized by X-ray diffraction and scanning electron
microscopy and by depth-profiling the composition with secondary neutron mass spectroscopy. Films
grown without ammonia had surprisingly low nitrogen levels, indicating that 2 and 3 are not suited as
single-source precursors for pure WNx phases. When ammonia was used as a co reactant gas, the carbon
content in the films decreased significantly and crystalline β-W2N was obtained. Interestingly, films
grown in the presence of ammonia by amido compound 2 yielded lower carbon contents than films
obtained from hydrido compound 3.