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[Ca(Thd)2(Tetraen)]:  A Monomeric Precursor for Deposition of CaS Thin Films

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posted on 1997-05-15, 00:00 authored by Timo Hänninen, Ilpo Mutikainen, Ville Saanila, Mikko Ritala, Markku Leskelä, Jonathan C. Hanson
[Ca3(thd)6] (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) dissolved in hexane and in the presence of tetraethylenepentamine (tetraen) crystallizes as a 1:1 [Ca(thd)2(tetraen)] adduct complex in the orthorhombic Pccn space group with a = 10.874(2) Å, b = 15.480(3) Å, c = 20.866(4) Å, and Z = 4. The molecule is monomeric with an 8-coordinated calcium atom. The adduct complex volatilized at lower temperature than the nonadducted complex. [Ca(thd)2(tetraen)] can be utilized as a precursor in growth CaS thin films by the atomic layer epitaxy method. The growth rate with [Ca(thd)2(tetraen)] is lower (0.43 Å/cycle) than that with [Ca3(thd)6] (0.50 Å/cycle).

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