cm9606078_si_001.pdf (1.32 MB)
[Ca(Thd)2(Tetraen)]: A Monomeric Precursor for Deposition of CaS Thin Films
journal contribution
posted on 1997-05-15, 00:00 authored by Timo Hänninen, Ilpo Mutikainen, Ville Saanila, Mikko Ritala, Markku Leskelä, Jonathan C. Hanson[Ca3(thd)6] (thd =
2,2,6,6-tetramethyl-3,5-heptanedionato) dissolved in hexane and in
the
presence of tetraethylenepentamine (tetraen) crystallizes as a 1:1
[Ca(thd)2(tetraen)] adduct
complex in the orthorhombic Pccn space group with
a = 10.874(2) Å, b = 15.480(3) Å,
c =
20.866(4) Å, and Z = 4. The molecule is
monomeric with an 8-coordinated calcium atom.
The adduct complex volatilized at lower temperature than the
nonadducted complex. [Ca(thd)2(tetraen)] can be utilized as a precursor in
growth CaS thin films by the atomic layer
epitaxy method. The growth rate with
[Ca(thd)2(tetraen)] is lower (0.43 Å/cycle)
than that
with [Ca3(thd)6] (0.50
Å/cycle).