nl048355u_si_001.pdf (20.03 kB)
Polymer Imprint Lithography with Molecular-Scale Resolution
journal contribution
posted on 2004-12-08, 00:00 authored by Feng Hua, Yugang Sun, Anshu Gaur, Matthew A. Meitl, Lise Bilhaut, Lolita Rotkina, Jingfeng Wang, Phil Geil, Moonsub Shim, John A. Rogers, Anne ShimWe show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography with feature
sizes as small as 2 nm − comparable to the size of an individual molecule. The angstrom level uniformity in the critical dimensions of the
features provided by this unusual type of template provides a unique ability to investigate systematically the resolution of imprint lithography
at this molecular scale. Collective results of experiments with several polymer formulations for the molds and the molded materials suggest
that the density of cross-links is an important molecular parameter that influences the ultimate resolution in this process. Optimized materials
enable reliable, repetitive patterning in this single nanometer range.