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Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
journal contribution
posted on 2017-12-21, 00:00 authored by Davide Barreca, Giorgio Carraro, Ettore Fois, Alberto Gasparotto, Filippo Gri, Roberta Seraglia, Martin Wilken, Alfonso Venzo, Anjana Devi, Gloria Tabacchi, Chiara MaccatoA viable route to
manganese-based materials of high technological
interest is plasma-assisted chemical vapor deposition (PA-CVD), offering
various degrees of freedom for the growth of high-purity nanostructures
from suitable precursors. In this regard, fluorinated β-diketonate
diamine Mn(II) complexes of general formula Mn(dik)2·TMEDA
[TMEDA = N,N,N′,N′-tetramethylethylenediamine; Hdik = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione
(Hhfa), or 1,1,1-trifluoro-2,4-pentanedione (Htfa)] represent a valuable
option in the quest of candidate molecular sources for PA-CVD environments.
In this work, we investigate and highlight the chemico-physical properties
of these compounds of importance for their use in PA-CVD processes,
through the use of a comprehensive experimental–theoretical
investigation. Preliminary PA-CVD validation shows the possibility
of varying the Mn oxidation state, as well as the system chemical
composition from MnF2 to MnO2, by simple modulations
of the reaction atmosphere, paving the way to a successful utilization
of the target compounds in the growth of manganese-containing nanomaterials
for different technological applications.
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manganese-containing nanomaterialsGrowth ProcessPA-CVD processessystem chemical compositionPA-CVD environmentsPlasma-Assisted CVDMn OxidesPreliminary PA-CVD validationMnO 2chemico-physical propertiesTMEDAplasma-assisted chemical vapor depositiontarget compoundsreaction atmosphereMnF 2manganese-based materialsMn oxidation state
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