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High Resolution Multimodal Chemical Imaging Platform for Organics and Inorganics
journal contribution
posted on 2019-09-09, 18:35 authored by Songkil Kim, Artem Trofimov, Fouzia Khanom, Lewis Stern, William Lamberti, Robert Colby, David Abmayr, Alex Belianinov, Olga S. OvchinnikovaChemical
analysis at the nanoscale is critical to advance our understanding
of materials and systems from medicine and biology to material science
and computing. Macroscale-observed phenomena in these systems are
in the large part driven by processes that take place at the nanoscale
and are highly heterogeneous. Therefore, there is a clear need to
develop a new technology that enables correlative imaging of material
functionalities with nanoscale spatial and chemical resolutions that
will enable us to untangle the structure–function relationship
of functional materials. Therefore, here, we report on the analytical
figures of merit of the newly developed correlative chemical imaging
technique of helium ion microscopy coupled with secondary ion mass
spectrometry (HIM-SIMS) that enables multimodal topographical/chemical
imaging of organic and inorganic materials at the nanoscale. In HIM-SIMS,
a focused ion beam acts as a sputtering and ionization source for
chemical analysis along with simultaneous high-resolution surface
imaging, providing an unprecedented level of spatial resolution for
gathering chemical information on organic and inorganic materials.
In this work, we demonstrate HIM-SIMS as a platform for a next-generation
tool for an in situ material design and analysis capable of down to
8 nm spatial resolution chemical imaging, layered metal structure
imaging in depth profiling, single graphene layer detection, and spectral
analysis of metals, metal oxides, and polymers.
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Keywords
metal structure imagingchemical analysisionization sourcesurface imagingchemical resolutionsMacroscale-observed phenomenaion mass spectrometrymaterial designcorrelative imagingHigh Resolution Multimodal Chemical Imaging Platformmaterial functionalities8 nmInorganics Chemical analysiscorrelative chemical imaging techniquehelium ion microscopymetal oxidesHIM-SIMSresolution chemical imagingnext-generation toolnanoscalegathering chemical informationion beam actsgraphene layer detectionmaterial science
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