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Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition
journal contribution
posted on 2015-09-22, 00:00 authored by Chiao-Chen Chen, Chia-Jung Kuo, Chun-Da Liao, Chin-Fu Chang, Chi-Ang Tseng, Chia-Rung Liu, Yit-Tsong ChenTo synthesize large-area graphene
single crystals, we specifically
designed a low-pressure chemical vapor deposition (LPCVD) reactor
with confined reaction space (L 22 mm × W 13 mm × H 50 μm).
Within the confined reaction space, a uniform distribution of reactant
concentrations, reduced substrate roughness, and the shift of growth
kinetics toward a diffusion-limited regime can be achieved, favoring
the preparation of large-area, high-quality graphene single crystals.
The gas flow field and mass transport pattern of reactants in the
LPCVD system simulated with a finite element method support the advantages
of using this confined reaction room for graphene growth. Using this
space-confined reactor together with the optimized synthesis parameters,
we obtained monolayer, highly uniform, and defect-free graphene single
crystals of up to ∼0.8 mm in diameter with the field-effect
mobility of μEF ∼ 4800 cm2 V–1 s–1 at room temperature. In addition,
structural design of the confined reaction space by adjusting the
reactor’s dimensions is of facile controllability and scalability,
which demonstrates the superiority and preference of this method for
industrial applications.