jp9b09809_si_001.pdf (96.74 kB)
Distortion Correction for an Imaging Ellipsometer
journal contribution
posted on 2020-03-20, 16:44 authored by Thong
Q. Ly, Steven BaldelliA simple
imaging add-on utilizing the combination of a relay lens
and an optical grating to a nulling ellipsometer for the purpose of
imaging and correcting angular distortion is designed, built, and
tested. Image contrast is achieved on a standardized silicon wafer,
graphene transferred on silicon wafer, a self-assembled monolayer
of 1-octadecanethiol on gold, and a 1:1 mixture of dilauroylphosphatidylcholine
/ distearoylphosphatidylcholine (DLPC/DSPC) on copper. The configuration
used in this paper corrects the angular distortion and depth of focus
with a spatial resolution of 4.38 μm in the laser’s incident
direction and 7.81 μm in the direction that is perpendicular
to the incident plane together with 3 Å of normal resolution
while still maintaining a large field of view of at least 720 μm
× 550 μm in focus without executing any line scanning,
post-image reconstruction, or specially customized objective method.
Better resolution is possibly attained with higher NA optics.