Wang, Biqiong Liu, Jian Norouzi Banis, Mohammad Sun, Qian Zhao, Yang Li, Ruying Sham, Tsun-Kong Sun, Xueliang Atomic Layer Deposited Lithium Silicates as Solid-State Electrolytes for All-Solid-State Batteries Development of solid-state electrolyte (SSE) thin films is a key toward the fabrication of all-solid-state batteries (ASSBs). However, it is challenging for conventional deposition techniques to deposit uniform and conformal SSE thin films in a well-controlled fashion. In this study, atomic layer deposition (ALD) was used to fabricate lithium silicate thin films as a potential SSE for ASSBs. Lithium silicates thin films were deposited by combining ALD Li<sub>2</sub>O and SiO<sub>2</sub> subcycles using lithium <i>tert</i>-butoxide, tetraethylorthosilane, and H<sub>2</sub>O as precursors. Uniform and self-limiting growth was achieved at temperatures between 225 and 300 °C. X-ray absorption spectroscopy analysis disclosed that the as-deposited lithium silicates were composed of SiO<sub>4</sub> tetrahedron structure and lithium oxide as the network modifier. X-ray photoelectron spectroscopy confirmed the chemical states of Li in the thin films were the same with that in standard lithium silicate. With one to one subcycle of Li<sub>2</sub>O and SiO<sub>2</sub> the thin films had a composition close to Li<sub>4</sub>SiO<sub>4</sub> whereas one more subcycle of Li<sub>2</sub>O delivered a higher lithium content. The lithium silicate thin film prepared at 250 °C exhibited an ionic conductivity of 1.45× 10<sup>–6</sup> S cm<sup>–1</sup> at 373 K. The high ionic conductivity of lithium silicate was due to the higher lithium concentration and lower activation energy. Atomic Layer Deposited Lithium Silicates;Li 2 O;SiO 2 subcycles;ASSB;SiO 4 tetrahedron structure;lithium silicate;ALD Li 2 O;X-ray absorption spectroscopy analysis;H 2 O;Li 4 SiO 4;All-Solid-State Batteries Development;as-deposited lithium silicates;film;X-ray photoelectron spectroscopy;SSE 2017-07-27
    https://acs.figshare.com/articles/journal_contribution/Atomic_Layer_Deposited_Lithium_Silicates_as_Solid-State_Electrolytes_for_All-Solid-State_Batteries/5394874
10.1021/acsami.7b07113.s001