10.1021/nn4018872.s001
Jaesung Lee
Jaesung
Lee
Zenghui Wang
Zenghui
Wang
Keliang He
Keliang
He
Jie Shan
Jie
Shan
Philip X.-L. Feng
Philip X.-L.
Feng
High Frequency MoS<sub>2</sub> Nanomechanical Resonators
American Chemical Society
2016
Mo atoms covalently
transition regimes
transition metal dichalcogenides
microwave frequencies
9 monolayers
MoS 2 nanodevices
ultrathin MoS 2 nanomechanical resonators
semiconducting material
S atoms
MoS 2 diaphragms
TMDC
factor products
VHF
High Frequency MoS 2 Nanomechanical ResonatorsMolybdenum disulfide
6 nm
MoS 2 2 D resonators
room temperature
2016-02-19 03:00:19
Journal contribution
https://acs.figshare.com/articles/journal_contribution/High_Frequency_MoS_sub_2_sub_Nanomechanical_Resonators/2393959
Molybdenum disulfide (MoS<sub>2</sub>), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on the demonstration of movable and vibrating MoS<sub>2</sub> nanodevices, where MoS<sub>2</sub> diaphragms as thin as 6 nm (a stack of 9 monolayers) exhibit fundamental-mode nanomechanical resonances up to <i>f</i><sub>0</sub> ∼ 60 MHz in the very high frequency (VHF) band, and frequency-quality (<i>Q</i>) factor products up to <i>f</i><sub>0</sub> × <i>Q</i> ∼ 2 × 10<sup>10</sup>Hz, all at room temperature. The experimental results from many devices with a wide range of thicknesses and lateral sizes, in combination with theoretical analysis, quantitatively elucidate the elastic transition regimes in these ultrathin MoS<sub>2</sub> nanomechanical resonators. We further delineate a roadmap for scaling MoS<sub>2</sub> 2D resonators and transducers toward microwave frequencies. This study also opens up possibilities for new classes of vibratory devices to exploit strain- and dynamics-engineered ultrathin semiconducting 2D crystals.