Xu, Xiaochuan Subbaraman, Harish Chakravarty, Swapnajit Hosseini, Amir Covey, John Yu, Yalin Kwong, David Zhang, Yang Lai, Wei-Cheng Zou, Yi Lu, Nanshu Chen, Ray T. Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2 × 10<sup>4</sup> and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation. 5 mm radius;silicon photonic components;devices promise;substrate removal approach;silicon photonic devices;quality factor;ambient index variation 2014-12-23
    https://acs.figshare.com/articles/journal_contribution/Flexible_Single_Crystal_Silicon_Nanomembrane_Photonic_Crystal_Cavity/2223103
10.1021/nn504393j.s001