Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity Xiaochuan Xu Harish Subbaraman Swapnajit Chakravarty Amir Hosseini John Covey Yalin Yu David Kwong Yang Zhang Wei-Cheng Lai Yi Zou Nanshu Lu Ray T. Chen 10.1021/nn504393j.s001 https://acs.figshare.com/articles/journal_contribution/Flexible_Single_Crystal_Silicon_Nanomembrane_Photonic_Crystal_Cavity/2223103 Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2 × 10<sup>4</sup> and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation. 2014-12-23 00:00:00 5 mm radius silicon photonic components devices promise substrate removal approach silicon photonic devices quality factor ambient index variation